Xenon Difluoride
二氟化氙（XeF2），又稱二氟代氙，分子量為169.30，是一種無色固體，在室溫下容易升華而形成透明晶體。二氟化氙在中性或堿性溶液中分解，在酸性溶液中較為穩(wěn)定，水溶液有刺激氣味。二氟化氙蒸汽是無色的，具有令人發(fā)嘔的惡臭。在電子工業(yè)中，XeF2常被用作硅的蝕刻氣體，由于XeF2和硅的化學(xué)反應(yīng)是自發(fā)反應(yīng)，XeF2對(duì)硅的腐蝕工藝具有非常高的選擇性，在XeF2對(duì)硅進(jìn)行腐蝕過程中，XeF2氣體通過自由擴(kuò)散到硅襯底表面，并與最外層硅原子發(fā)生化學(xué)反應(yīng)生成氣態(tài)Xe和氣態(tài)SiF4，從而實(shí)現(xiàn)對(duì)硅的腐蝕。
Xenon difluoride (XeF2) is a colorless solid with a molecular weight of 169.30, it is easy to sublimate at room temperature and form transparent crystals. Xenon difluoride decomposes in neutral or alkaline solution, but it is stable in acidic solution and has a pungent odor in aqueous solutions. Vapor of xenon difluoride is colorless and has a disgusting stench. In the electronic industry, XeF2 is often used as etching gas of silicon, chemical reaction of XeF2 and silicon is spontaneous reaction, corrosion process of XeF2 to silicon has high selectivity, in the corrosion process of XeF2 to silicon, XeF2 gets to the surface of silicon substrate through free gas diffusion, and react with the outermost silicon atoms to generate gaseous Xe and gaseous SiF4, so as to realize corrosion of silicon.
| 項(xiàng)目Items | 單位Units | 指標(biāo)Index |
| 二氟化氙Xenon difluoride（XeF2）≥ | Vol.% | 99.9 |
| 鉀Kalium（K）≤ | mg/kg | 0.18 |
| 鈣Calcium（Ca）≤ | mg/kg | 0.15 |
| 鈉Sodium（Na）≤ | mg/kg | 0.70 |
| 鎂Magnesium（Mg）≤ | mg/kg | 0.12 |
| 鋁Aluminum（Al）≤ | mg/kg | 0.17 |
| 鋅Zinc（Zn）≤ | mg/kg | 0.30 |
| 鐵Iron（Fe）≤ | mg/kg | 1.21 |
| 鉛Plumbum（Pb）≤ | mg/kg | 0.07 |
| 銅Cuprum（Cu）≤ | mg/kg | 0.05 |
| 鉻Chromium（Cr）≤ | mg/kg | 0.15 |
| 錳（Mn）≤ | mg/kg | 0.04 |
| 鉬Manganese（Mo）≤ | mg/kg | 0.15 |
| 鎳Nickel（Ni）≤ | mg/kg | 0.83 |
| 磷Phosphorus（P）≤ | mg/kg | 0.14 |
在電子工業(yè)中，XeF 2常被用作硅的蝕刻氣體。此外，二氟化氙是一種選擇性很好的氟化試劑，在無機(jī)氟化物制備及有機(jī)合成中有廣泛的應(yīng)用，但其只有在氣相和非水溶液中才具有氟化性質(zhì)，在水溶液中只能起氧化劑的作用。
XeF2 is usually used as etching gas of silicon in the electronics industry. In addition, xenon difluoride is a kind of selective fluridizer, which is widely used in the preparation of inorganic fluoride and organic synthesis, but only in gas phase and non-aqueous solution it can used as fluridizer, and only in aqueous solution it can used as oxidant.
二氟化氙是一個(gè)穩(wěn)定的化合物，可長期儲(chǔ)放于鎳制容器或鋁合金無縫鋼瓶內(nèi)，包裝規(guī)格有100g、500g、1kg、2kg和5kg規(guī)格，以滿足科研院所及生產(chǎn)型企業(yè)的不同要求。具體包裝規(guī)格可根據(jù)用戶需求定制更改。二氟化氙儲(chǔ)存于陰涼、通風(fēng)的庫房，應(yīng)與氧化劑、食用化學(xué)品、堿金屬分開存放，遠(yuǎn)離火種、熱源。
Xenon difluoride is a stable compound and it can be stored in nickel containers or aluminum alloy seamless cylinder for a long time. In order to satisfy the different requirements of scientific research institutes and enterprises, the packaging specifications include 100g, 500g, 1kg, 2kg and 5kg etc. Specific packaging specifications can be customized according to user requirements. Xenon difluoride shall be stored in a shady and ventilated storeroom, separated from the oxidant、 food chemicals、alkali metal, kept away from fire sources.
