Octafluoropropane
八氟丙烷(C3F8)是一種無色、無味、不可燃的惰性氣體。八氟丙烷熔點為-183.0℃，沸點為-36.7℃，難溶于水。電子級高純八氟丙烷應用在半導體器件制造過程中，與氧氣的混合氣可用作等離子蝕刻氣體。
Octafluoropropane (C3F8) is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 183.0 ℃, boiling point is 36.7 ℃, poorly soluble in water. Electronic grade octafluoropropane is used in semiconductor materials and semiconductor device manufacturing. The mixture of octafluoropropane and oxygen is used as plasma etching material, which can selectively interact with the metal matrix of silicon wafer.
| 項目 Items | 單位 Unit | 指標 Indexs | |
| C3F8 | Vol.% | ≥99.999 | ≥99.9995 |
| O2+Ar | Vol.ppm | ＜1 | ＜0.5 |
| N2 | Vol.ppm | ＜5 | ＜1 |
| CO | Vol.ppm | ＜0.5 | ＜0.5 |
| CO2 | Vol.ppm | ＜0.5 | ＜0.5 |
| CF4 | Vol.ppm | ＜0.5 | ＜0.5 |
| C2F6 | Vol.ppm | ＜0.5 | ＜0.5 |
| CH4 | Vol.ppm | ＜1 | ＜1 |
| H2O | Vol.ppm | ＜1 | ＜1 |
| 酸度Acidity (Mesured by HF) | Wt. ppm | ＜0.1 | ＜0.1 |
| 總雜質(zhì)含量 Total impurity content | Mol.ppm | ≤10 | ≤5 |
在半導體工業(yè)中，八氟丙烷用作等離子蝕刻材料；在醫(yī)學中，八氟丙烷可用于玻璃體視網(wǎng)膜手術(shù)后填充物及超聲造影劑；八氟丙烷還可用于制作制冷混合物。
In the semiconductor industry, octafluoropropane is used as plasma etching materials; In medicine, octafluoropropane can be used as a filler and contrast agent after vitreoretinal surgery. Octafluoropropane is also used as an ingredient in refrigerating mixtures.
八氟丙烷充裝在經(jīng)特殊處理的潔凈、干燥的無縫高壓氣瓶中，氣瓶容積分別為4L、8L、10L、12.5L、40L等。具體包裝規(guī)格可根據(jù)用戶需求定制更改。
Octafluoropropane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.
