Triethyl Borate11
硼11酸三乙酯又稱硼酸乙酯、三乙氧基硼，化學(xué)式為C6H15BO3，分子量為145.99，熔點(diǎn)為-84.5℃，沸點(diǎn)為117.5℃。硼11酸三乙酯為無色透明液體，有輕度氣味，有顯著的熱穩(wěn)定性，能與乙醇、乙醚混溶，遇水分解。硼11酸三乙酯可作為摻雜源摻入到硅片表面薄層中，并使其達(dá)到規(guī)定的數(shù)量和符合要求的分布形式，以改變半導(dǎo)體的電化學(xué)性質(zhì)，可以制造PN結(jié)、電阻、互聯(lián)線等。
Triethyl borate is also called ethyl borate，ortriethoxy-boron, its chemical formula is C6H15BO3, molecular weight is 145.99, melting point is 84.5 ℃, boiling point is 117.5 ℃. Triethyl borate is colorless transparent liquid, which has a mild scent, significant thermostability, it is miscible with ethanol, ethyl ether In order to change the electrochemical properties of semiconductors, triethyl borate11 can be used as a doping source to dope into the thin layer on the surface of the silicon wafer, which makes silicon wafer reach specified quantity and required distribution form, and then PN junction, resistance and interconnection line etc. can be manufactured.
| 項目Items | 單位Units | 指標(biāo)Index |
| 純度Purity≥ | % | 99.9999995（8.5N） |
| 主含量Main content≥ | % | 99.99 |
| 顆粒數(shù)Quantity of particles（≥0.3μm max） | p/ml | 7 |
| 顆粒數(shù)Quantity of particles（≥0.5μm max） | p/ml | 5 |
| 色度Chroma≤ | APHA | 5 |
| 水份Moisture≤ | ppm | 20 |
| 氯化物Chloride≤ | ppb | 50 |
硼11酸三乙酯可用于半導(dǎo)體元器件的制造中，以改變半導(dǎo)體的電化學(xué)性質(zhì)，也可用作其他有機(jī)硼化物的合成、增塑劑及焊接助熔劑。
Triethyl borate11 can be used in the manufacture of semiconductor components to change the electrochemical properties of semiconductor, and it also can be used in the synthesis of other organic boron compounds, plasticizer and welding flux.
電子級硼酸三乙酯貯存在標(biāo)準(zhǔn)無縫鋼瓶中，包裝規(guī)格為19L，具體包裝規(guī)格可根據(jù)用戶需求定制更改。產(chǎn)品儲存于干燥、通風(fēng)良好的庫房中，禁止堆放，遠(yuǎn)離火種、熱源，防止雨淋、陽光直射，應(yīng)與氧化劑、食用化學(xué)品分開存放。
Electronic grade triethyl borate is stored in standard seamless cylinders, the packing specification is 19L, specific packaging specifications can be customized according to users’ requirements. The product is stored in dry and ventilated storeroom away from fire and heat source, which is forbidden to stack. Protecting against rain and direct sunlight. It should be separately stored with oxidizing agent and edible chemicals.
