Diborane11
乙硼11烷，又稱六氫化二硼、硼乙烷，分子式為B2H6，相對(duì)分子量為27.67。乙硼烷在正常條件下（15℃，101.325kPa）是一種無(wú)色、易燃、易分解、具有令人惡心的煙火氣味和微甜味道的高毒氣體。乙硼烷是一種非?；顫姷幕衔?，常溫下就不很穩(wěn)定，會(huì)緩慢地分解生成各種不同含量的硼氫化合物，同時(shí)會(huì)放出氫氣。乙硼烷遇水立即水解，最終得到硼酸和大量的氫氣。乙硼11烷在電子工業(yè)中作為氣態(tài)雜質(zhì)源、離子注入和硼摻雜氧化擴(kuò)散的摻雜劑使用。
Diborane has a molecular formula of B2H6 and a relative molecular weight of 27.67. Diborane is a kind of colorless, flammable, labile and high toxic gas with disgusting fireworks smell and sweet taste at normal conditions (15℃, 101.325kPa). Diborane is a very reactive compound that is unstable at room temperature and decomposes slowly to form a variety of borohydrides in different contents, hydrogen is generated at same time. Diborane hydrolyzes immediately encountering with water, generating boric acid and a large amount of hydrogen. Diborane11 is used as dopant for gaseous impurity source, ion implantation and boron doped oxide diffusion in the electronic industry.
| 項(xiàng)目Items | 單位Units | 指標(biāo)Index |
| 乙硼11烷，Diborane11≥ | Vol.% | 99.99 |
| CH4+C2H6，≤ | ppm | 80 |
| 氮?dú)猓琋itrogen≤ | ppm | 10 |
乙硼11烷可在微電子、平板顯示、太陽(yáng)能電池、LED、光纖、醫(yī)藥、核電等領(lǐng)域應(yīng)用，也可用作聚合催化劑。乙硼11烷在半導(dǎo)體制造中用作硅材料的p型摻雜源，用于半導(dǎo)體生產(chǎn)，硅和鍺的外延生長(zhǎng)、鈍化、擴(kuò)散和離子注入。
Diborane can be used in microelectronics, flat panel display, solar cells, LED, optical fiber, medicine, nuclear power and other fields, also can be used as polymerization catalyst. Diborane11 is a p-doped source of silicon used in semiconductor manufacturing, epitaxial growth, passivation, diffusion, and ion implantation of silicon and germanium.
乙硼11烷存放于不銹鋼鋼瓶中，在室溫條件下，鋼瓶?jī)?nèi)純乙硼11烷每月要分解10%~20%，在低溫下乙硼11烷可以貯存幾個(gè)月且分解速度低得多，但乙硼11烷儲(chǔ)存溫度不應(yīng)低于-80℃。儲(chǔ)存區(qū)應(yīng)遠(yuǎn)離明火、火花、熱源，并應(yīng)備有泄漏應(yīng)急處理設(shè)備。
Diborane11 is stored in stainless steel cylinders, pure diborane11 in the cylinder decomposes 10%~20% a month at room temperature, diborane11 can be stored a few months and the decomposition rate is much lower in low temperature, but storage temperature of diborane11 should not be lower than -80℃. Storage area shall be away from open flame, spark and heat source, and shall be equipped with equipment for emergency.
