High Pure Fluorine
氟氣（F2），相對(duì)分子量為38.00，沸點(diǎn)為-188℃，溶于水，是一種具有刺激性氣味的強(qiáng)氧化性淺黃色有毒氣體。氟氣化學(xué)性質(zhì)異?；顫?，幾乎能與所有的元素發(fā)生反應(yīng)，被譽(yù)為自然界中最活潑的物質(zhì)。氟氣可以賦予含氟材料和含氟化學(xué)品許多優(yōu)異的性能，在信息、電子和化工領(lǐng)域應(yīng)用廣泛。高純氟氣作為化學(xué)氣相沉積反應(yīng)腔室的清洗劑，具有很強(qiáng)的反應(yīng)活性且不會(huì)造成溫室效應(yīng)，在半導(dǎo)體領(lǐng)域極具市場潛力。
Fluorine (F2) is a kind of strong oxidizing light yellow poisonous gas with pungent smell, relative molecular mass of 38.00, the boiling point of -188 ℃, which is soluble in water. Fluorine gas is known as the most active substance in nature due to its extremely active chemical properties, which can react with almost all elements. Fluorine gas can endow fluorine-containing materials and chemicals with many excellent properties and is widely used in the fields of information, electronics and chemicals. As cleaning agent for the reaction chamber of chemical vapor deposition, high pure fluorine gas has strong reactivity and will not cause greenhouse effect, so it has great market potential in the field of semiconductor.
| 項(xiàng)目Items | 單位Units | 指標(biāo)Indexs | |
| 氟氣（F2）Fluorine | Vol.% | ≧99% | ≧99.99% |
| 四氟化碳（CF4）Carbon tetrafluoride | Vol.% | ≤0.1%（v/v） | ≤0.001%（v/v） |
| 空氣（Air） | Vol.% | ≤0.5%（v/v） | ≤0.006%（v/v） |
| 氟化氫（HF）Hydrogen fluoride | Vol.% | ≤0.2%（v/v） | ≤0.001%（v/v） |
| 二氧化碳（CO2）Carbon dioxide | Vol.% | ≤0.1%（v/v） | ≤0.001%（v/v） |
| 六氟化硫（SF6）Sulfur hexafluoride | Vol.% | ≤0.1%（v/v） | ≤0.001%（v/v） |
氟氣因其特殊的性質(zhì)，可用作化學(xué)氣相沉積反應(yīng)腔室的清洗劑，也可作為氟化試劑用于無機(jī)含氟材料、有機(jī)含氟材料、半導(dǎo)體材料制造領(lǐng)域。氟氣被廣泛應(yīng)用于電子、激光技術(shù)、醫(yī)藥、塑料、石油化工、航空航天等領(lǐng)域，是化工領(lǐng)域的重要原料。
Fluorine gas can be used as cleaning agent for reaction chamber of chemical vapor deposition because of its special properties, also can be used as fluridizer for inorganic fluorine-containing materials, organic fluorine-containing materials and semiconductor manufacturing materials. Fluorine gas is widely used in electronics, laser technology, medicine, plastics, petroleum chemical industry, aerospace and other fields, which is an important raw material in the field of chemical industry.
高純氟氣壓縮充入鋼瓶中，在包裝貯存氟氣之前要對(duì)其儲(chǔ)運(yùn)鋼瓶內(nèi)壁進(jìn)行有效的鈍化處理。具體包裝規(guī)格可根據(jù)用戶要求定制。高純氟氣存儲(chǔ)于陰涼、通風(fēng)倉庫內(nèi)，倉庫溫度不應(yīng)超過30℃，遠(yuǎn)離火種熱源，與易燃或可燃物、金屬粉末等分開存放，并防止陽光直射。
High pure fluorine gas is compressed and filled into the cylinder. Before packaging and storing fluorine gas, effective "passivation treatment" should be carried out on the inner wall of the storage and transportation cylinder. Specific packaging specifications can be customized according to user requirements. High pure fluorine gas is stored in a shady and ventilated storeroom away from fire and heat source, temperature of storeroom is lower than 30℃. It should be separately stored with inflammable (combustible) and metal powder, protecting againstdirect sunlight.
