High Pure Hydrogen
高純氫（H2）是一種無色無臭的可燃氣體，在空氣中的可燃極限為4.1%~74.1%（體積濃度），其自燃溫度為571.2℃，沸點為-252.8℃，熔點為-259.2℃。常溫下，氫氣的性質很穩(wěn)定，不容易跟其它物質發(fā)生化學反應。高純氫在電子微芯片等行業(yè)中有著非常重要的應用，在一些電子材料的生長與襯底的制備、氧化工藝、外延工藝以及化學氣相沉積技術中，均采用氫氣作為反應氣、還原氣或保護氣。
High pure hydrogen (H2) is a kind of colorless, odorless combustible gas withflammability limit in the air of 4.1% ~ 74.1% (volume concentration), its autoignition temperature is 571.2℃, boiling point is 252.8℃, melting point is 259.2℃. Hydrogen is stable at room temperature, and it is not easy to react with other substances. High purity hydrogen has a very important application in electronic microchip and other industries. Hydrogen is used as reaction gas, reduction gas or protective gasduring the oxidation process, epitaxy process and chemical vapor deposition (CVD) technology of some electronic materials.
| Items | 單位Units | 指標Indexs | ||
| 超純氫 Ultra pure hydrogen | 高純氫 High pure hydrogen | 純氫 Pure hydrogen | ||
| Hydrogen2）≥ | Vol.% | 99.9999 | 99.999 | 99.99 |
| 氧、氬 Oxygen, Argon（O2、Ar）≤ | Vol.ppm | 0.2 | 1 | 5 |
| 氮氣Nitrogen（N2）≤ | Vol.ppm | 0.4 | 5 | 60 |
| 一氧化碳 Carbon monoxide（CO）≤ | Vol.ppm | 0.1 | 1 | 5 |
| 二氧化碳 Carbon dioxide（CO2）≤ | Vol.ppm | 0.1 | 1 | 5 |
| 甲烷Methane（CH4）≤ | Vol.ppm | 0.2 | 1 | 10 |
| 水分Moisture（H2O）≤ | Vol.ppm | 1.0 | 3 | 30 |
氫是主要的工業(yè)原料，也是重要的工業(yè)氣體和特種氣體。在電子微芯片的制造中，需要采用氫氣作為反應氣、還原氣或保護氣。除此之外，氫氣在石油化工、冶金工業(yè)、食品加工、浮法玻璃、精細有機合成、航空航天等方面有著廣泛的應用。同時，氫也是一種理想清潔的二次能源，航天工業(yè)中更是使用液氫作為燃料。
Hydrogen is a kind of main industrial raw material, and also an important industrial gas and special gas. In the manufacture of electronic microchips, hydrogen gas is used as reaction gas, reduction gas or protection gas. In addition, hydrogen is widely used in petrochemical industry, metallurgical industry, food processing, float glass, minute organic synthesis, aerospace and other fields. At the same time, hydrogen is also an ideal and clean secondary energy, and liquid hydrogen is used as fuel in the aerospace industry.
高純氫充裝在鋼質無縫氣瓶中，鋼瓶規(guī)格為10L、40L。具體包裝規(guī)格可根據(jù)客戶需求定制更改。高純氫儲存于陰涼、通風的庫房中，遠離火種、熱源。庫房采用防爆型照明、通風設施，庫溫不超過30 ℃，相對濕度不超過80%。
The high pure hydrogen is stored in standard seamless cylinders, the packing specifications include 10L and 40L. Specific packaging specifications can be customized according to user requirements. High pure hydrogen is stored in a shady and ventilated storeroom away from fire and heat sources. Storeroom uses explosion-proof lighting, ventilation, temperature of storeroom is lower than 30℃, and relative humidity of storeroom is less than 80%.
