Silicon Tetrafluoride
四氟化硅（SiF4），又稱氟化硅，分子式為SiF4，分子量為104.06，是一種無色、有毒、有刺激性臭味的氣體。四氟化硅易潮解，在潮濕空氣中可產(chǎn)生濃煙霧。四氟化硅溶于乙醇、醚、硝酸、氫氟酸，吸濕性非常強(qiáng)，加壓下變成液體，在電子行業(yè)中，四氟化硅有著廣泛的應(yīng)用。
Silicon tetrafluoride (SiF4) is a kind of colorless, toxic, pungent and smelly gas with a molecular weight of 104.06. Silicon tetrafluoride is easily deliquescent and can produce thick smoke in damp air. Silicon tetrafluoride is soluble in ethanol, ether, nitric acid, hydrofluoric acid, its hygroscopicity is very strong and SiF4 changes into a liquid under pressure, silicon tetrafluoride has a wide range of applications in the electronic industry.
| 項(xiàng)目Items | 單位Units | 指標(biāo)Index |
| 四氟化硅Silicon tetrafluoride（SiF4）≥ | Vol.% | 99.999 |
| 氫Hydrogen（H2）≤ | Vol.ppm | 1 |
| 氧+氬Oxygen + Argon（O2+Ar）≤ | Vol.ppm | 0.5 |
| 氮Nitrogen（N2）≤ | Vol.ppm | 4 |
| 一氧化碳Carbon monoxide（CO）≤ | Vol.ppm | 0.1 |
| 二氧化碳Carbon dioxide（CO2）≤ | Vol.ppm | 0.3 |
| 甲烷Methane（CH4）≤ | Vol.ppm | 1 |
| 硫化氫Hydrogen sulfide（SH2）≤ | Vol.ppm | 0.1 |
| 氧氣Oxygen（O2）≤ | Vol.ppm | 0.1 |
| 二氧化硫Sulfur dioxide（SO2）≤ | Vol.ppm | 10 |
| 總雜質(zhì)含量Total impurity content≤ | Vol.ppm | 1 |
| 六氟二甲基硅醚Hexafluorodimethyl silicone ether | 供需雙方商定 Supply and demand agreement | 供需雙方商定 Supply and demand agreement |
| As、B、P | 供需雙方商定 Supply and demand agreement | 供需雙方商定 Supply and demand agreement |
| 顆粒Particle | 供需雙方商定 Supply and demand agreement | 供需雙方商定 Supply and demand agreement |
四氟化硅在電子行業(yè)中主要用作氮化硅、硅化鉭等的P型摻雜劑、蝕刻劑及外延沉積擴(kuò)散硅源等，還可用于制備電子級(jí)硅烷或硅。此外，四氟化硅可用于制備太陽能電池、氟硅酸和氟化硅、水泥和人造大理石的硬化劑。
Silicon tetrafluoride is mainly used as p-type dopant, etching agent and epitaxial deposition diffusion silicon source of silicon nitride and tantalum silicide in the electronic industry, and SiF4 can also be used to prepare electronic silane or silicon. In addition, silicon tetrafluoride can be used to produce solar cells, fluorosilicic acid and silicon fluoride, cement and hardener of artificial marble.
四氟化硅充裝在鋼質(zhì)無縫氣瓶中，鋼瓶容積分別為8 L、44 L、47 L。具體包裝規(guī)格可根據(jù)用戶需求定制更改。四氟化硅儲(chǔ)存于陰涼、干燥、通風(fēng)良好的庫房中，遠(yuǎn)離火種、熱源。庫溫不宜超過30℃，儲(chǔ)區(qū)應(yīng)備有泄漏應(yīng)急處理設(shè)備。
Silicon tetrafluoride is stored in standard seamless cylinders, the packing specifications include 8L, 44L and 47L respectively. Specific packaging specifications can be customized according to user requirements. Silicon tetrafluoride is stored in a shady, dry and ventilated storeroom away from fire and heat source. Temperature of storeroom is lower than 30 ℃, the storage area shall be equipped with equipment for emergency.
