Molybdenum Hexafluoride
六氟化鉬（MoF6），相對分子量為209.93，熔點為17.5℃，沸點為35℃，低溫下為白色塊狀結(jié)晶，對濕空氣敏感。在強氧化劑存在下，六氟化鉬能侵蝕許多金屬（金、鉑除外），使金屬表面變?yōu)樗{(lán)色。六氟化鉬可用于鉬的同位素分離，在電子工業(yè)中用作化學(xué)氣相淀積硅化鉬或鉬，以制作低電阻、高熔點的互連線和柵極。
Molybdenum hexafluoride (MoF6) is a kind of white blocky crystal at low temperature, its relative molecular weight is 209.93, melting point is 17.5℃ and boiling point is 35℃, it is sensitive to wet air. Molybdenum hexafluoride can erode a lot of metals (except gold and platinum) and turn the metal surface blue. Molybdenum hexafluoride can be used for isotope separation of molybdenum and it is used in the electronic industry for chemical vapor deposition of molybdenum silicide or molybdenum, in order to produce interconnects and grid electrode with low resistance and high melting point.
| 項目Items | 單位Units | 指標(biāo)Indexs | ||
| 六氟化鉬Molybdenum hexafluoride≥ | Vol.% | 99.9 | 99.999 | 99.9995 |
| 四氟化碳Carbon tetrafluoride（CF4）≤ | Vol.ppm | 10 | 0.5 | 0.5 |
| 氮氣Nitrogen（N2）≤ | Vol.ppm | 50 | 1 | 0.5 |
| （氧+氬）Oxygen+ Argon.（O2+Ar）≤ | Vol.ppm | 50 | 0.5 | 0.5 |
| 二氧化碳Carbon dioxide（CO2）≤ | Vol.ppm | - | 0.5 | 0.5 |
| 一氧化碳Carbon monoxide（CO）≤ | Vol.ppm | - | 0.5 | 0.5 |
| 六氟化硫Sulfur hexafluoride（SF6）≤ | Vol.ppm | 10 | 0.5 | 0.5 |
| 四氟化硅Silicon tetrafluoride（SiF4）≤ | Vol.ppm | 10 | 0.5 | 0.5 |
| 氟化氫Hydrogen fluoride（HF）≤ | Vol.ppm | 800 | 1 | 1 |
六氟化鉬的主要應(yīng)用領(lǐng)域是在微電子工業(yè)中用化學(xué)氣相沉積硅化鉬或鉬，以制作低電阻、高熔點的互連線，也可用作強氟化劑、成膜材料及離子摻雜劑，還可用于鉬同位素分離。
The main application fields of molybdenum hexafluoride are chemical vapor deposition of molybdenum silicide or molybdenum in microelectronics industry, in order to produce interconnects and grid electrode with low resistance and high melting point. It can also be used as strong fluridizer, film-forming material, ion dopant and molybdenum isotope separation.
六氟化鉬充裝在鋼質(zhì)無縫氣瓶中，鋼瓶容積分別為8L和47L，具體包裝規(guī)格可根據(jù)用戶需求定制更改。六氟化鉬儲存干陰涼、干燥、通風(fēng)良好的庫房中，遠(yuǎn)離火種、熱源。儲區(qū)應(yīng)備有泄漏應(yīng)急處理設(shè)備。
Molybdenum hexafluoride is stored in standard seamless cylinders, the packing specifications include 8L and 47L respectively. Specific packaging specifications can be customized according to user requirements. Molybdenum hexafluoride is stored in a shady, dry and ventilated storeroom away from fire and heat source. The storage area shall be equipped with equipment for emergency.
