Trifluoroiodomethane
三氟碘甲烷，又稱三氟甲基碘，分子式為CF3I，分子量為195.91。三氟碘甲烷為無色無味氣體，無毒、阻燃、油溶性和材料相容性好，是傳統(tǒng)氟利昂制冷劑的替代品之一，具有滅火效率高，安全性能好，經(jīng)濟效益高等特點。三氟碘甲烷作為半導體刻蝕氣體，與同種刻蝕氣體CF4、C4F6相比，蝕刻時具有更高的選擇性和高深寬比。
Molecular formula of trifluoroiodomethane is CF3I and its molecular weight is 195.91. Trifluoroiodomethane is a kind of colorless and odorless gas. It is non-toxic, fireproof, oil soluble and well-materials compatibility. It is one of the substitutes of traditional freon refrigerant with characteristics of high extinguishing efficiency, good safety performance and well economic benefit. As a kind of semiconductor etching gas, trifluoroiodomethane has higher selectivity and aspect ratio compares with the same etching gas CF4 and C4F6.
| 項目Items | 單位Units | 指標Index |
| 純度Purity≥ | Vol.% | 99.9 |
| （氧+氬）Oxygen+ Argon（O2+Ar）≤ | Vol.ppm | 300 |
| 一氧化碳Carbon monoxide（CO）≤ | Vol.ppm | 200 |
| 氮氣Nitrogen（N2）≤ | Vol.ppm | 200 |
| 二氧化碳Carbon dioxide（CO2）≤ | Vol.ppm | 200 |
| 六氟乙烷Hexafluoroethane(C2F6)≤ | Vol.ppm | 50 |
| 八氟丙烷Octafluoropropane(C3F8)≤ | Vol.ppm | 50 |
三氟碘甲烷可用作半導體刻蝕氣體、電氣設備絕緣與滅弧氣體、滅火劑、制冷劑等。此外，三氟碘甲烷還能與有機金屬試劑作用，是有機合成中引入氟代甲基的重要含氟中間體，可廣泛應用于有機合成、生物化學、農(nóng)藥、醫(yī)藥、表面活性劑和染料等領域。
Trifluoroiodomethane can be used as semiconductor etching gas, electrical equipment insulation, arc extinguishing gas, extinguishing agent and refrigerant, etc. In addition, trifluoroiodomethane can also interact with organometallic reagents, it is an important fluorine-containing intermediates of introducing fluoro-methyl in organic synthesis. It can be widely used in organic synthesis, biochemistry, pesticide, medicine, surfactant, dye and other fields.
三氟碘甲烷充裝在鋼質(zhì)無縫氣瓶中，鋼瓶容積分別為10L、47L、400 L，具體包裝規(guī)格可根據(jù)用戶需求定制更改。三氟碘甲烷儲存干陰涼、干燥、通風良好的庫房，遠離火種、熱源。庫溫不宜超過30℃，儲區(qū)應備有泄漏應急處理設備。
Trifluoroiodomethane is stored in standard seamless cylinders, the packing specifications include 10 L, 47 L and 400 L respectively. Specific packaging specifications can be customized according to user’s requirements. Trifluoroiodomethane is stored in a shady, dry and ventilated storeroom away from fire and heat source. Temperature of storeroom is lower than 30℃, the storage area shall be equipped with equipment for emergency.
